Design of a short stroke actuator for a wafer stepper

E.P. Jansen, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Kamerbeek, E.M.H., Supervisor Compter, John, External supervisor
Award date	1 Jan 1994
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Instituut Vervolgopleidingen
Print ISBNs	90-5282-407-X
Publication status	Published - 1994

Eindverslag

Cite this

@phdthesis{953df886adab41418e70e8001cf03dfb,

title = "Design of a short stroke actuator for a wafer stepper",

author = "E.P. Jansen and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen}",

note = "Eindverslag",

year = "1994",

language = "English",

isbn = "90-5282-407-X",

publisher = "Technische Universiteit Eindhoven. Instituut Vervolgopleidingen",

type = "EngD Thesis",

}