Design of a nanometer capacative probe

R.H. Lu, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen

Research output: ThesisPd Eng Thesis

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
Supervisors/Advisors
  • Schellekens, Piet, Supervisor
  • Haitjema, Han, Supervisor
  • Pril, W.O., Supervisor
Award date1 Jan 1999
Place of PublicationEindhoven
Publisher
Print ISBNs90-5282-936-5
Publication statusPublished - 1999

Bibliographical note

Eindverslag

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