Design of a nanometer capacative probe

R.H. Lu, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Schellekens, Piet, Supervisor Haitjema, Han, Supervisor Pril, W.O., Supervisor
Award date	1 Jan 1999
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-5282-936-5
Publication status	Published - 1999

Eindverslag

Cite this

@phdthesis{858298bceb6c4b7c859f96c7cb5b506f,

title = "Design of a nanometer capacative probe",

author = "R.H. Lu and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen}",

note = "Eindverslag",

year = "1999",

language = "English",

isbn = "90-5282-936-5",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}