Design of a multi-process multi-product wafer fab

E.J.J. Campen, van

    Research output: ThesisPhd Thesis 2 (Research NOT TU/e / Graduation TU/e)

    1189 Downloads (Pure)
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Department of Mechanical Engineering
    Supervisors/Advisors
    • Rooda, J.E. (Koos), Promotor
    • Aarts, Emile H.L., Promotor
    • Etman, L.F.P. (Pascal), Copromotor
    Award date24 Apr 2001
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-386-2752-1
    DOIs
    Publication statusPublished - 2001

    Cite this

    Campen, van, E. J. J. (2001). Design of a multi-process multi-product wafer fab. Technische Universiteit Eindhoven. https://doi.org/10.6100/IR543392