Design of a multi-process multi-product wafer fab

E.J.J. Campen, van

Research output: ThesisPhd Thesis 2 (Research NOT TU/e / Graduation TU/e)Academic

LanguageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Mechanical Engineering
Supervisors/Advisors
  • Rooda, Koos, Promotor
  • Aarts, Emile, Promotor
  • Etman, Pascal, Copromotor
Award date24 Apr 2001
Place of PublicationEindhoven
Publisher
Print ISBNs90-386-2752-1
DOIs
StatePublished - 2001

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Campen, van, E. J. J. (2001). Design of a multi-process multi-product wafer fab Eindhoven: Technische Universiteit Eindhoven DOI: 10.6100/IR543392
Campen, van, E.J.J.. / Design of a multi-process multi-product wafer fab. Eindhoven : Technische Universiteit Eindhoven, 2001. 143 p.
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title = "Design of a multi-process multi-product wafer fab",
author = "{Campen, van}, E.J.J.",
year = "2001",
doi = "10.6100/IR543392",
language = "English",
isbn = "90-386-2752-1",
publisher = "Technische Universiteit Eindhoven",
school = "Department of Mechanical Engineering",

}

Campen, van, EJJ 2001, 'Design of a multi-process multi-product wafer fab', Doctor of Philosophy, Department of Mechanical Engineering, Eindhoven. DOI: 10.6100/IR543392

Design of a multi-process multi-product wafer fab. / Campen, van, E.J.J.

Eindhoven : Technische Universiteit Eindhoven, 2001. 143 p.

Research output: ThesisPhd Thesis 2 (Research NOT TU/e / Graduation TU/e)Academic

TY - THES

T1 - Design of a multi-process multi-product wafer fab

AU - Campen, van,E.J.J.

PY - 2001

Y1 - 2001

U2 - 10.6100/IR543392

DO - 10.6100/IR543392

M3 - Phd Thesis 2 (Research NOT TU/e / Graduation TU/e)

SN - 90-386-2752-1

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -

Campen, van EJJ. Design of a multi-process multi-product wafer fab. Eindhoven: Technische Universiteit Eindhoven, 2001. 143 p. Available from, DOI: 10.6100/IR543392