Design of a multi-process multi-product wafer fab

E.J.J. Campen, van

Research output: Thesis › Phd Thesis 2 (Research NOT TU/e / Graduation TU/e)

2874 Downloads (Pure)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Mechanical Engineering
Supervisors/Advisors	Rooda, Koos, Promotor Aarts, Emile H.L., Promotor Etman, L.F.P. (Pascal), Copromotor
Award date	24 Apr 2001
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-386-2752-1
DOIs	https://doi.org/10.6100/IR543392
Publication status	Published - 2001

Access to Document

@phdthesis{f43cd664282f4babb3d3b85b48feaed1,

title = "Design of a multi-process multi-product wafer fab",

author = "{Campen, van}, E.J.J.",

year = "2001",

doi = "10.6100/IR543392",

language = "English",

isbn = "90-386-2752-1",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 2 (Research NOT TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}