Design of a multi-process multi-product wafer fab

E.J.J. Campen, van

    Research output: ThesisPhd Thesis 2 (Research NOT TU/e / Graduation TU/e)

    1549 Downloads (Pure)
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Mechanical Engineering
    Supervisors/Advisors
    • Rooda, Koos, Promotor
    • Aarts, Emile H.L., Promotor
    • Etman, L.F.P. (Pascal), Copromotor
    Award date24 Apr 2001
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-386-2752-1
    DOIs
    Publication statusPublished - 2001

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