Design of a Magnetically Levitated nm-Resolution Linear Slider

D.A.H. Laro; T. Porck; J. Spronck; A. Lebedev; J. Eijk, van

Design of a Magnetically Levitated nm-Resolution Linear Slider

D.A.H. Laro, T. Porck, J. Spronck, A. Lebedev, J. Eijk, van

Electromechanics and Power Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proc. 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Place of Publication	Baden, Austria
Publisher	European Society for Precision Engineering and Nanotechnology
Publication status	Published - 2006
Event	6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006) - Baden bei Wien, Austria Duration: 28 May 2006 → 1 Jun 2006 Conference number: 6

Conference

Conference	6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006)
Abbreviated title	EUSPEN 2006
Country/Territory	Austria
City	Baden bei Wien
Period	28/05/06 → 1/06/06

Cite this

@inproceedings{d965b4c8525b4f979e05d36f12eeba4c,

title = "Design of a Magnetically Levitated nm-Resolution Linear Slider",

author = "D.A.H. Laro and T. Porck and J. Spronck and A. Lebedev and \{Eijk, van\}, J.",

year = "2006",

language = "English",

booktitle = "Proc. 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)",

publisher = "European Society for Precision Engineering and Nanotechnology",

note = "6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006), EUSPEN 2006 ; Conference date: 28-05-2006 Through 01-06-2006",

}

Laro, DAH, Porck, T, Spronck, J, Lebedev, A & Eijk, van, J 2006, Design of a Magnetically Levitated nm-Resolution Linear Slider. in Proc. 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN). European Society for Precision Engineering and Nanotechnology, Baden, Austria, 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006), Baden bei Wien, Austria, 28/05/06.

Design of a Magnetically Levitated nm-Resolution Linear Slider. / Laro, D.A.H.; Porck, T.; Spronck, J. et al.
Proc. 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN). Baden, Austria: European Society for Precision Engineering and Nanotechnology, 2006.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design of a Magnetically Levitated nm-Resolution Linear Slider

AU - Laro, D.A.H.

AU - Porck, T.

AU - Spronck, J.

AU - Lebedev, A.

AU - Eijk, van, J.

N1 - Conference code: 6

PY - 2006

Y1 - 2006

M3 - Conference contribution

BT - Proc. 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)

PB - European Society for Precision Engineering and Nanotechnology

CY - Baden, Austria

T2 - 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006)

Y2 - 28 May 2006 through 1 June 2006

ER -