Design of a Magnetically Levitated nm-Resolution Linear Slider

D.A.H. Laro, T. Porck, J. Spronck, A. Lebedev, J. Eijk, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Place of PublicationBaden, Austria
PublisherEuropean Society for Precision Engineering and Nanotechnology
Publication statusPublished - 2006
Event6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006) - Baden bei Wien, Austria
Duration: 28 May 20061 Jun 2006
Conference number: 6

Conference

Conference6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2006)
Abbreviated titleEUSPEN 2006
CountryAustria
CityBaden bei Wien
Period28/05/061/06/06

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