Design of a magnetic gravity compensation system

S.A.J. Hol; E.A. Lomonova; A.J.A. Vandenput

doi:10.1016/j.precisioneng.2005.09.005

Design of a magnetic gravity compensation system

S.A.J. Hol
, E.A. Lomonova
, A.J.A. Vandenput

Research output: Contribution to journal › Article › Academic › peer-review

59 Citations (Scopus)

47 Downloads (Pure)

Abstract

An extremely accurate positioning over relatively long ranges is accomplished by absorbing or suppressing vibrations. Highly accurate frames or stages should be supported against gravity. In addition, the external disturbance forces acting on these stages need to be cancelled in a feedback control loop. In this paper a new, low-cost, vacuum compatible gravity compensation system is presented, which eliminates vibrations and which is able to generate forces to counteract the disturbing ones as well.

Original language	English
Pages (from-to)	265-273
Number of pages	9
Journal	Precision Engineering
Volume	30
Issue number	3
DOIs	https://doi.org/10.1016/j.precisioneng.2005.09.005
Publication status	Published - 2006

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10.1016/j.precisioneng.2005.09.005

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title = "Design of a magnetic gravity compensation system",

abstract = "An extremely accurate positioning over relatively long ranges is accomplished by absorbing or suppressing vibrations. Highly accurate frames or stages should be supported against gravity. In addition, the external disturbance forces acting on these stages need to be cancelled in a feedback control loop. In this paper a new, low-cost, vacuum compatible gravity compensation system is presented, which eliminates vibrations and which is able to generate forces to counteract the disturbing ones as well.",

author = "S.A.J. Hol and E.A. Lomonova and A.J.A. Vandenput",

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AU - Vandenput, A.J.A.

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AB - An extremely accurate positioning over relatively long ranges is accomplished by absorbing or suppressing vibrations. Highly accurate frames or stages should be supported against gravity. In addition, the external disturbance forces acting on these stages need to be cancelled in a feedback control loop. In this paper a new, low-cost, vacuum compatible gravity compensation system is presented, which eliminates vibrations and which is able to generate forces to counteract the disturbing ones as well.

U2 - 10.1016/j.precisioneng.2005.09.005

DO - 10.1016/j.precisioneng.2005.09.005

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VL - 30

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JO - Precision Engineering

JF - Precision Engineering

IS - 3

ER -

Design of a magnetic gravity compensation system

Abstract

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