A popular approach to nano-positioning requirements in precision engineering in general and micro-lithography in particular is to subdivide the stage positioning architecture into a coarse positioning module with micrometer accuracy (Long Stroke), onto which a fine positioning module (Short Stroke) is cascaded. The latter is responsible for correcting the residual error of the coarse positioning module to the last nanometers. High accuracy positioning in 6 Degrees Of Freedom put severe constraints on the actuators and/or bearing systems. Actuators are used for generating a varying force being part of a control loop. Bearing systems should generate a force as constant as possible in the bearing direction, but the force perpendicular to that direction should be as low as possible. Actuators could serve as a bearing system, but on the one hand this would require the actuators to be large and thus heavy and on the other hand a substantial amount of heat is continuously dissipated in order to generate the static forces. Such heat generation does not contribute to the positioning performance of the actuators, but significantly affects the thermal stability of the application. The latter implication will be overcome if the bearing system is established by a system with permanent magnets.
|Title of host publication||Proceedings 3rd International Conference of the European Society for Precision Engineering and Nanotechhnology (Euspen), Vol. 1, Eindhoven, 26-30-05-2002|
|Editors||F.L.M. Delbressine, P.H.J. Schellekens, F.G.A. Homburg, H. Haitjema|
|Place of Publication||Eindhoven|
|Publisher||Technische Universiteit Eindhoven|
|Publication status||Published - 2002|