Design of a low-cost CMM with nanometer uncertainty

M.C.J.M. van Rie, E.J.C. Bos, F.G.A. Homburg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.

Original languageEnglish
Title of host publicationProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
EditorsH. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Place of PublicationBedfordshire
PublisherEuropean Society for Precision Engineering and Nanotechnology
Pages384-387
Number of pages4
ISBN (Electronic)9780955308284
Publication statusPublished - 1 Jan 2010
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 - Delft, Netherlands
Duration: 31 May 20104 Jun 2010

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
CountryNetherlands
CityDelft
Period31/05/104/06/10

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