Design of a low-cost CMM with nanometer uncertainty

M.C.J.M. van Rie; E.J.C. Bos; F.G.A. Homburg

Design of a low-cost CMM with nanometer uncertainty

M.C.J.M. van Rie, E.J.C. Bos, F.G.A. Homburg

Group Den Toonder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Abstract

A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.

Original language	English
Title of host publication	Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Editors	H. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Place of Publication	Bedfordshire
Publisher	European Society for Precision Engineering and Nanotechnology
Pages	384-387
Number of pages	4
ISBN (Electronic)	9780955308284
Publication status	Published - 1 Jan 2010
Event	10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010) - Delft, Netherlands Duration: 31 May 2010 → 4 Jun 2010 Conference number: 10

Conference

Conference	10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010)
Country/Territory	Netherlands
City	Delft
Period	31/05/10 → 4/06/10

Cite this

van Rie, M. C. J. M., Bos, E. J. C., & Homburg, F. G. A. (2010). Design of a low-cost CMM with nanometer uncertainty. In H. Van Brussel, H. Spaan, P. Shore, & T. Burke (Eds.), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 (pp. 384-387). European Society for Precision Engineering and Nanotechnology.

van Rie, M.C.J.M. ; Bos, E.J.C. ; Homburg, F.G.A. / Design of a low-cost CMM with nanometer uncertainty. Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. editor / H. Van Brussel ; Henny Spaan ; P. Shore ; Theresa Burke. Bedfordshire : European Society for Precision Engineering and Nanotechnology, 2010. pp. 384-387

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title = "Design of a low-cost CMM with nanometer uncertainty",

abstract = "A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.",

author = "{van Rie}, M.C.J.M. and E.J.C. Bos and F.G.A. Homburg",

year = "2010",

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day = "1",

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booktitle = "Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010",

publisher = "European Society for Precision Engineering and Nanotechnology",

note = "10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010) ; Conference date: 31-05-2010 Through 04-06-2010",

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van Rie, MCJM, Bos, EJC & Homburg, FGA 2010, Design of a low-cost CMM with nanometer uncertainty. in H Van Brussel, H Spaan, P Shore & T Burke (eds), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. European Society for Precision Engineering and Nanotechnology, Bedfordshire, pp. 384-387, 10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010), Delft, Netherlands, 31/05/10.

Design of a low-cost CMM with nanometer uncertainty. / van Rie, M.C.J.M.; Bos, E.J.C.; Homburg, F.G.A.

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. ed. / H. Van Brussel; Henny Spaan; P. Shore; Theresa Burke. Bedfordshire : European Society for Precision Engineering and Nanotechnology, 2010. p. 384-387.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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BT - Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

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A2 - Shore, P.

A2 - Burke, Theresa

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Y2 - 31 May 2010 through 4 June 2010

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Design of a low-cost CMM with nanometer uncertainty

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