Design of a fractional-order integrator for high-precision stages

J. van der Weijde; M.F. Heertjes

doi:10.1109/ACC.2014.6858754

Design of a fractional-order integrator for high-precision stages

J. van der Weijde, M.F. Heertjes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

To provide more tuning freedom in the trade-off between overshoot and settling times of PID controlled stages, a PID controller with a fractional order integrator is studied. The fractional order integrator has two parameters dependent on the order ¿. Namely, the corner frequency ¿i(¿) and the gain kp(¿). Both parameters are designed such that robust stability is maintained independent on the choice of ¿. It will be shown that the fractional order integrator can be approximated by a low-order loop shaping filter. As such, insights from fractional order control can be used by the control engineer to aid his tuning tasks. The controller is tested on a wafer stage system.

Original language	English
Title of host publication	Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.
Place of Publication	Portland, OR
Publisher	Institute of Electrical and Electronics Engineers
Pages	978-983
DOIs	https://doi.org/10.1109/ACC.2014.6858754
Publication status	Published - 2014
Event	2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA - Hilton Portland & Executive Tower , Portland, OR, United States Duration: 4 Jun 2014 → 6 Jun 2014 http://acc2014.a2c2.org/

Conference

Conference	2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA
Abbreviated title	ACC 2014
Country/Territory	United States
City	Portland, OR
Period	4/06/14 → 6/06/14
Internet address	http://acc2014.a2c2.org/

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10.1109/ACC.2014.6858754

Cite this

@inproceedings{f779ec4111c44c629ba0f3e1fec61a2d,

title = "Design of a fractional-order integrator for high-precision stages",

abstract = "To provide more tuning freedom in the trade-off between overshoot and settling times of PID controlled stages, a PID controller with a fractional order integrator is studied. The fractional order integrator has two parameters dependent on the order ¿. Namely, the corner frequency ¿i(¿) and the gain kp(¿). Both parameters are designed such that robust stability is maintained independent on the choice of ¿. It will be shown that the fractional order integrator can be approximated by a low-order loop shaping filter. As such, insights from fractional order control can be used by the control engineer to aid his tuning tasks. The controller is tested on a wafer stage system.",

author = "{van der Weijde}, J. and M.F. Heertjes",

year = "2014",

doi = "10.1109/ACC.2014.6858754",

language = "English",

pages = "978--983",

booktitle = "Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA, ACC 2014 ; Conference date: 04-06-2014 Through 06-06-2014",

url = "http://acc2014.a2c2.org/",

}

van der Weijde, J & Heertjes, MF 2014, Design of a fractional-order integrator for high-precision stages. in Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.. Institute of Electrical and Electronics Engineers, Portland, OR, pp. 978-983, 2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA, Portland, OR, United States, 4/06/14. https://doi.org/10.1109/ACC.2014.6858754

Design of a fractional-order integrator for high-precision stages. / van der Weijde, J.; Heertjes, M.F.
Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.. Portland, OR: Institute of Electrical and Electronics Engineers, 2014. p. 978-983.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Heertjes, M.F.

PY - 2014

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N2 - To provide more tuning freedom in the trade-off between overshoot and settling times of PID controlled stages, a PID controller with a fractional order integrator is studied. The fractional order integrator has two parameters dependent on the order ¿. Namely, the corner frequency ¿i(¿) and the gain kp(¿). Both parameters are designed such that robust stability is maintained independent on the choice of ¿. It will be shown that the fractional order integrator can be approximated by a low-order loop shaping filter. As such, insights from fractional order control can be used by the control engineer to aid his tuning tasks. The controller is tested on a wafer stage system.

AB - To provide more tuning freedom in the trade-off between overshoot and settling times of PID controlled stages, a PID controller with a fractional order integrator is studied. The fractional order integrator has two parameters dependent on the order ¿. Namely, the corner frequency ¿i(¿) and the gain kp(¿). Both parameters are designed such that robust stability is maintained independent on the choice of ¿. It will be shown that the fractional order integrator can be approximated by a low-order loop shaping filter. As such, insights from fractional order control can be used by the control engineer to aid his tuning tasks. The controller is tested on a wafer stage system.

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DO - 10.1109/ACC.2014.6858754

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BT - Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.

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Y2 - 4 June 2014 through 6 June 2014

ER -

Design of a fractional-order integrator for high-precision stages

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