Design of a fast step-and-scan wafer stepper

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

3 Downloads (Pure)

Abstract

no abstract.

Original language	English
Title of host publication	OR at wORk : Practical experiences of operational research
Editors	L. Fortuin, P. Beek, van, L. Wassenhove, van
Place of Publication	London
Publisher	Taylor and Francis Ltd.
Pages	23-38
ISBN (Print)	0-7484-0455-4
Publication status	Published - 1996

@inbook{d70206691894430dbd2ac56e42ff6fd0,

title = "Design of a fast step-and-scan wafer stepper",

abstract = "no abstract.",

author = "C.M.H. Kuijpers and C.A.J. Hurkens and J.B.M. Melissen",

year = "1996",

language = "English",

isbn = "0-7484-0455-4",

pages = "23--38",

editor = "L. Fortuin and \{Beek, van\}, P. and \{Wassenhove, van\}, L.",

booktitle = "OR at wORk : Practical experiences of operational research",

publisher = "Taylor and Francis Ltd.",

address = "United Kingdom",

}

TY - CHAP

T1 - Design of a fast step-and-scan wafer stepper

AU - Kuijpers, C.M.H.

AU - Hurkens, C.A.J.

AU - Melissen, J.B.M.

PY - 1996

Y1 - 1996

N2 - no abstract.

AB - no abstract.

M3 - Chapter

SN - 0-7484-0455-4

SP - 23

EP - 38

BT - OR at wORk : Practical experiences of operational research

A2 - Fortuin, L.

A2 - Beek, van, P.

A2 - Wassenhove, van, L.

PB - Taylor and Francis Ltd.

CY - London

ER -