Design of a data-driven method to predict error-code triggers in the EUV Source Laser

Navoneel Chakrabarty

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Muntean, Tiberiu, Supervisor Calzada Morales, Sophia, External supervisor, External person Gebresilassie, Abel, External supervisor Fursich, Katrin, External supervisor, External person
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 1 Sept 2024

EngD thesis. - Permanently confidential.

Cite this

@phdthesis{c9c00e64a05e4838a95befa136cd07bd,

title = "Design of a data-driven method to predict error-code triggers in the EUV Source Laser",

author = "Navoneel Chakrabarty",

note = "EngD thesis. - Permanently confidential.",

year = "2024",

month = sep,

day = "1",

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}