Design for an internal transport and storage system for silicon wafers processed in a new IC wafer fab

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Rooda, Koos, Supervisor Dirne, Corne, Supervisor Wilkens, A.U., External supervisor, External person
Award date	1 Jan 1995
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-5282-533-5
Publication status	Published - 1995

Eindverslag.

Cite this

@phdthesis{55ce561c48a14c7da5cdc50b4e317b7c,

title = "Design for an internal transport and storage system for silicon wafers processed in a new IC wafer fab",

author = "\{Campen, van\}, E.J.J.",

note = "Eindverslag.",

year = "1995",

language = "English",

isbn = "90-5282-533-5",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}