Design for an internal transport and storage system for silicon wafers processed in a new IC wafer fab

E.J.J. Campen, van, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Ontwerpen van Logistieke Besturingssystemen

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • Rooda, Koos, Supervisor
    • Dirne, Corne, Supervisor
    • Wilkens, A.U., External supervisor, External person
    Award date1 Jan 1995
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-5282-533-5
    Publication statusPublished - 1995

    Bibliographical note

    Eindverslag.

    Cite this