Design for an internal transport and storage system for silicon wafers processed in a new IC wafer fab

E.J.J. Campen, van; Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Ontwerpen van Logistieke Besturingssystemen

Design for an internal transport and storage system for silicon wafers processed in a new IC wafer fab

E.J.J. Campen, van, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Ontwerpen van Logistieke Besturingssystemen

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Rooda, Koos, Supervisor Dirne, Corne, Supervisor Wilkens, A.U., External supervisor, External person
Award date	1 Jan 1995
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-5282-533-5
Publication status	Published - 1995

Bibliographical note

Eindverslag.

Cite this

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title = "Design for an internal transport and storage system for silicon wafers processed in a new IC wafer fab",

author = "{Campen, van}, E.J.J. and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Ontwerpen van Logistieke Besturingssystemen}",

note = "Eindverslag.",

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language = "English",

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publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

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