Design complexity reduction using object-oriented pagadigm: exemplified by redesigning the scanning application of ASML's wafer positioning module

Wahyu Utomo

Design complexity reduction using object-oriented pagadigm: exemplified by redesigning the scanning application of ASML's wafer positioning module

Wahyu Utomo

Research output: Thesis › EngD Thesis

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Original language	English
Supervisors/Advisors	Weffers, Harold, Supervisor Hendriks, Maikel, External supervisor, External person
Award date	7 Oct 2019
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 24 Oct 2019

Bibliographical note

PDEng thesis

Access to Document

2019-10-24_ST_Utomo_WFinal published version, 1.4 MB

Cite this

@phdthesis{3722dd3b980c459da3e741e750842d85,

title = "Design complexity reduction using object-oriented pagadigm: exemplified by redesigning the scanning application of ASML's wafer positioning module",

author = "Wahyu Utomo",

note = "PDEng thesis",

year = "2019",

month = oct,

day = "24",

language = "English",

series = "PDEng report",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}