Design complexity reduction using object-oriented pagadigm: exemplified by redesigning the scanning application of ASML's wafer positioning module

Wahyu Utomo

    Research output: ThesisPd Eng Thesis

    116 Downloads (Pure)
    Original languageEnglish
    • Weffers, H.T.G. (Harold), Supervisor
    • Hendriks, Maikel, External supervisor, External person
    Award date7 Oct 2019
    Place of PublicationEindhoven
    Publication statusPublished - 24 Oct 2019

    Bibliographical note

    PDEng thesis

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