Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty

R. Henselmans; L.A. Cacace; P.C.J.N. Rosielle; M. Steinbuch

Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty

R. Henselmans
, L.A. Cacace
, P.C.J.N. Rosielle
, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

1 Downloads (Pure)

Abstract

A new measurement machine is being developed capable of universal, non-contact and fast measurement of freeform optics with a measurement uncertainty of 30 nm (2s). The detailed design is now almost complete and realization is progressing rapidly. The ambitious requirements are still expected to be met and completion is expected in the 3rd quarter of 2007.

Original language	English
Title of host publication	Proceedings of the 7th Euspen International Conference, 20-24 May 2007, Bremen, Germany
Place of Publication	Germany, Bremen
Pages	13-16
Publication status	Published - 2007

Nanomefos
Rosielle, P. C. J. N. (Manager)
Mechanical Engineering
Facility/equipment: Equipment

Cite this

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title = "Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty",

abstract = "A new measurement machine is being developed capable of universal, non-contact and fast measurement of freeform optics with a measurement uncertainty of 30 nm (2s). The detailed design is now almost complete and realization is progressing rapidly. The ambitious requirements are still expected to be met and completion is expected in the 3rd quarter of 2007.",

author = "R. Henselmans and L.A. Cacace and P.C.J.N. Rosielle and M. Steinbuch",

year = "2007",

language = "English",

pages = "13--16",

booktitle = "Proceedings of the 7th Euspen International Conference, 20-24 May 2007, Bremen, Germany",

}

Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty. / Henselmans, R.; Cacace, L.A.; Rosielle, P.C.J.N. et al.
Proceedings of the 7th Euspen International Conference, 20-24 May 2007, Bremen, Germany. Germany, Bremen, 2007. p. 13-16.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty

AU - Henselmans, R.

AU - Cacace, L.A.

AU - Rosielle, P.C.J.N.

AU - Steinbuch, M.

PY - 2007

Y1 - 2007

N2 - A new measurement machine is being developed capable of universal, non-contact and fast measurement of freeform optics with a measurement uncertainty of 30 nm (2s). The detailed design is now almost complete and realization is progressing rapidly. The ambitious requirements are still expected to be met and completion is expected in the 3rd quarter of 2007.

AB - A new measurement machine is being developed capable of universal, non-contact and fast measurement of freeform optics with a measurement uncertainty of 30 nm (2s). The detailed design is now almost complete and realization is progressing rapidly. The ambitious requirements are still expected to be met and completion is expected in the 3rd quarter of 2007.

M3 - Conference contribution

SP - 13

EP - 16

BT - Proceedings of the 7th Euspen International Conference, 20-24 May 2007, Bremen, Germany

CY - Germany, Bremen

ER -

Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty

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Nanomefos

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