Design and realization of a measurement machine for the universal non-contact measurement of large freeform optics with 30 nm uncertainty

R. Henselmans, L.A. Cacace, P.C.J.N. Rosielle, M. Steinbuch

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Abstract

A new measurement machine is being developed capable of universal, non-contact and fast measurement of freeform optics with a measurement uncertainty of 30 nm (2s). The detailed design is now almost complete and realization is progressing rapidly. The ambitious requirements are still expected to be met and completion is expected in the 3rd quarter of 2007.
Original languageEnglish
Title of host publicationProceedings of the 7th Euspen International Conference, 20-24 May 2007, Bremen, Germany
Place of PublicationGermany, Bremen
Pages13-16
Publication statusPublished - 2007

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  • Nanomefos

    Rosielle, P. C. J. N. (Manager)

    Mechanical Engineering

    Facility/equipment: Equipment

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