Design and realization of a long-stroke translation stage for SPM

C. Werner; P.C.J.N. Rosielle; M. Steinbuch

Design and realization of a long-stroke translation stage for SPM

C. Werner
, P.C.J.N. Rosielle
, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutch metrology institute (NMi - Van Swinden Laboratory). The instrument consists of a low-hysteresis elastic translation stage and a custom designed, kinematically mounted AFM measurement head. Here a short overview of the translation stage design will be given and some preliminary results presented.

Original language	English
Title of host publication	Proceedings of the 9th International conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Place of Publication	Spain, San Sebastian
Pages	1-4
Publication status	Published - 2009
Event	9th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2009) - San Sebastian, Spain Duration: 2 Jun 2009 → 5 Jun 2009 Conference number: 9

Conference

Conference	9th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2009)
Abbreviated title	EUSPEN 2009
Country/Territory	Spain
City	San Sebastian
Period	2/06/09 → 5/06/09

Cite this

@inproceedings{8c28ad8bbd9646c2a3cc5153c1a43bf5,

title = "Design and realization of a long-stroke translation stage for SPM",

abstract = "A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutch metrology institute (NMi - Van Swinden Laboratory). The instrument consists of a low-hysteresis elastic translation stage and a custom designed, kinematically mounted AFM measurement head. Here a short overview of the translation stage design will be given and some preliminary results presented.",

author = "C. Werner and P.C.J.N. Rosielle and M. Steinbuch",

year = "2009",

language = "English",

pages = "1--4",

booktitle = "Proceedings of the 9th International conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",

note = "9th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2009), EUSPEN 2009 ; Conference date: 02-06-2009 Through 05-06-2009",

}

Werner, C, Rosielle, PCJN & Steinbuch, M 2009, Design and realization of a long-stroke translation stage for SPM. in Proceedings of the 9th International conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Spain, San Sebastian, pp. 1-4, 9th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2009), San Sebastian, Spain, 2/06/09.

Design and realization of a long-stroke translation stage for SPM. / Werner, C.; Rosielle, P.C.J.N.; Steinbuch, M.
Proceedings of the 9th International conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Spain, San Sebastian, 2009. p. 1-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design and realization of a long-stroke translation stage for SPM

AU - Werner, C.

AU - Rosielle, P.C.J.N.

AU - Steinbuch, M.

N1 - Conference code: 9

PY - 2009

Y1 - 2009

N2 - A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutch metrology institute (NMi - Van Swinden Laboratory). The instrument consists of a low-hysteresis elastic translation stage and a custom designed, kinematically mounted AFM measurement head. Here a short overview of the translation stage design will be given and some preliminary results presented.

AB - A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutch metrology institute (NMi - Van Swinden Laboratory). The instrument consists of a low-hysteresis elastic translation stage and a custom designed, kinematically mounted AFM measurement head. Here a short overview of the translation stage design will be given and some preliminary results presented.

M3 - Conference contribution

SP - 1

EP - 4

BT - Proceedings of the 9th International conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

CY - Spain, San Sebastian

T2 - 9th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2009)

Y2 - 2 June 2009 through 5 June 2009

ER -

Design and realization of a long-stroke translation stage for SPM

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