Design and optical properties of electromechanical double-membrane photonic crystal cavities

We discuss relevant design considerations for the fabrication of electromechanically tunable photonic crystal cavities based on double semiconductor slabs. A simple optical and electromechanical model of the device based on coupled-mode theory and electrostatics is discussed and used jointly with 3-D finite-element calculations of optical cavity modes to extract the tuning-range dependence on geometrical parameters. A design rule, which avoids the sticking of membranes due to capillary forces and keeps a large tunability, is defined. The details of the fabrication process and a summary of the experimental results on GaAs and InGaAsP/InP material systems are given. We also address the problem of nonsymmetric devices, where the thicknesses of the membranes are not exactly the same, resulting in an imbalanced power emission of coupled modes.