Abstract
The first Mach-Zehnder interferometer (MZI modulator integrated with an arrayed-waveguide grating (AWG) based laser
shall be demonstrated. A novel 4-channel device as small as 4x8 mm2 is realized, employing only one AWG instead of
three needed conventionally. Integration of two required epitaxial layerstacks was realized by growing one waveguide
layer, locally removing it and regrowing a second layer in the etched region. The modulator design is optimized using
rigorous field simulation of the complex semiconductor layer stack. Almost perfect velocity match and low microwave
loss are obtained by 1 µm-narrow waveguides with a 2 µm signal electrode on top.
Original language | English |
---|---|
Title of host publication | proc. URSI General Assembly 2005, 23-29 October, New Delhi |
Place of Publication | New Delhi, India |
Publisher | International Union of Radio Science |
Pages | D07A5-1/4 |
Publication status | Published - 2005 |
Event | conference; URSI General Assembly 2005; 2005-10-23; 2005-10-29 - Duration: 23 Oct 2005 → 29 Oct 2005 |
Conference
Conference | conference; URSI General Assembly 2005; 2005-10-23; 2005-10-29 |
---|---|
Period | 23/10/05 → 29/10/05 |
Other | URSI General Assembly 2005 |