Design and integration of MZI modulators and AWG-based multiwavelength lasers in InP

W.W. Pascher, J.H. Besten, den, D. Caprioli, R. Dijk, van, F.E. Vliet, van, J.J.M. Binsma, E. Smalbrugge, T. Vries, de, R.G. Broeke, Y.S. Oei, E.A.J.M. Bente, X.J.M. Leijtens, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The first Mach-Zehnder interferometer (MZI modulator integrated with an arrayed-waveguide grating (AWG) based laser shall be demonstrated. A novel 4-channel device as small as 4x8 mm2 is realized, employing only one AWG instead of three needed conventionally. Integration of two required epitaxial layerstacks was realized by growing one waveguide layer, locally removing it and regrowing a second layer in the etched region. The modulator design is optimized using rigorous field simulation of the complex semiconductor layer stack. Almost perfect velocity match and low microwave loss are obtained by 1 µm-narrow waveguides with a 2 µm signal electrode on top.
Original languageEnglish
Title of host publicationproc. URSI General Assembly 2005, 23-29 October, New Delhi
Place of PublicationNew Delhi, India
PublisherURSI
PagesD07A5-1/4
Publication statusPublished - 2005
Eventconference; URSI General Assembly 2005; 2005-10-23; 2005-10-29 -
Duration: 23 Oct 200529 Oct 2005

Conference

Conferenceconference; URSI General Assembly 2005; 2005-10-23; 2005-10-29
Period23/10/0529/10/05
OtherURSI General Assembly 2005

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