Design and fabrication of a prototype actuator for fourier transform interferometry

G.G. Melpignano, A.M. Schaap, Y. Bellouard

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

The design, fabrication and characterisation of an uniaxial scanning-mirror component for interferometry applications is presented. The device is fabricated in fused silica by means of femtosecond laser irradiation and a selective etching step. The fabricated actuator produces bidirectional, repeatable sinusoidal motion with a displacement (200 µm) larger than the wavelengths under investigation (300–700 nm), rendering it suitable for application within an interferometry setup. This indicates that future fabrication of fully integrated interferometer measurement devices in fused silica are realisable.
Original languageEnglish
Title of host publicationProgress in Optomechatronic Technologies: Proceedings of the 2013 International Symposium on Optomechatronic Technologies, Oct 28–30, 2013, Jeju Island, Korea
EditorsR. Tutsch, Y.J. Cho, W.C. Wang, H. Cho
PublisherSpringer
Pages97-105
ISBN (Print)978-3-319-05711-8
DOIs
Publication statusPublished - 2014
Eventconference; 2013 International Symposium on Optomechatronic Technologies; 2013-10-28; 2013-10-30 -
Duration: 28 Oct 201330 Oct 2013

Publication series

NameLecture Notes in Electrical Engineering
Volume306
ISSN (Print)1876-1100

Conference

Conferenceconference; 2013 International Symposium on Optomechatronic Technologies; 2013-10-28; 2013-10-30
Period28/10/1330/10/13
Other2013 International Symposium on Optomechatronic Technologies

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