Design and development of model-driven software for vertical stage alignment of the ASML TWINSCAN machine : with focus on Algorithms and domain data services

I.M. Mintchev

Design and development of model-driven software for vertical stage alignment of the ASML TWINSCAN machine : with focus on Algorithms and domain data services

I.M. Mintchev

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Wijs, Anton J., Supervisor Dajsuren, Yanja, Supervisor
Award date	24 Oct 2018
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 24 Oct 2018

Bibliographical note

PDEng thesis. - Confidential for ever.

Cite this

@phdthesis{3348088f463445d6b122d166cd9b9aa3,

title = "Design and development of model-driven software for vertical stage alignment of the ASML TWINSCAN machine : with focus on Algorithms and domain data services",

author = "I.M. Mintchev",

note = "PDEng thesis. - Confidential for ever.",

year = "2018",

month = oct,

day = "24",

language = "English",

series = "PDEng report",

publisher = "Technische Universiteit Eindhoven",

}