| Original language | English |
|---|---|
| Award date | 1 Jan 1995 |
| Place of Publication | Eindhoven |
| Publisher | |
| Publication status | Published - 1995 |
Bibliographical note
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Design and construction of an in-line reactor for the laser-induced chemical vapour deposition of TiN
- J.J. Pisters
- , Y.H. Croonen
Research output: Thesis › EngD Thesis