Design and construction of an in-line reactor for the laser-induced chemical vapour deposition of TiN

J.J. Pisters, Y.H. Croonen, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Korte onderzoekersopleiding Scheikundige Technologie

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Award date1 Jan 1995
    Place of PublicationEindhoven
    Publication statusPublished - 1995

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