Deposition of hard amorphous hydrogenated carbon films from hyperthermal hydrocarbon radicals, studied by in situ real time infrared spectroscopy

Achim von Keudell; K.Y. Letourneur; M.C.M. van de Sanden

Deposition of hard amorphous hydrogenated carbon films from hyperthermal hydrocarbon radicals, studied by in situ real time infrared spectroscopy

Achim von Keudell
, K.Y. Letourneur
, M.C.M. van de Sanden

Research output: Contribution to conference › Abstract › Academic

Original language	English
Pages	TF+EL-WeA8
Number of pages	1
Publication status	Published - 2000
Event	47th International Symposium of the American Vacuum Society (AVS47) - Boston, United States Duration: 2 Oct 2000 → 6 Oct 2000

Conference

Conference	47th International Symposium of the American Vacuum Society (AVS47)
Abbreviated title	AVS47
Country/Territory	United States
City	Boston
Period	2/10/00 → 6/10/00

Cite this

@conference{8f979e8f1316497d917cf60e5ca3338e,

title = "Deposition of hard amorphous hydrogenated carbon films from hyperthermal hydrocarbon radicals, studied by in situ real time infrared spectroscopy",

author = "\{von Keudell\}, Achim and K.Y. Letourneur and \{van de Sanden\}, M.C.M.",

year = "2000",

language = "English",

pages = "TF+EL--WeA8",

note = "47th International Symposium of the American Vacuum Society (AVS47), AVS47 ; Conference date: 02-10-2000 Through 06-10-2000",

}

Deposition of hard amorphous hydrogenated carbon films from hyperthermal hydrocarbon radicals, studied by in situ real time infrared spectroscopy. / von Keudell, Achim; Letourneur, K.Y.; van de Sanden, M.C.M.
2000. TF+EL-WeA8 Abstract from 47th International Symposium of the American Vacuum Society (AVS47), Boston, Massachusetts, United States.

Research output: Contribution to conference › Abstract › Academic

TY - CONF

T1 - Deposition of hard amorphous hydrogenated carbon films from hyperthermal hydrocarbon radicals, studied by in situ real time infrared spectroscopy

AU - von Keudell, Achim

AU - Letourneur, K.Y.

AU - van de Sanden, M.C.M.

PY - 2000

Y1 - 2000

M3 - Abstract

SP - TF+EL-WeA8

T2 - 47th International Symposium of the American Vacuum Society (AVS47)

Y2 - 2 October 2000 through 6 October 2000

ER -