Deposition of hard amorphous hydrogenated carbon films from hyperthermal hydrocarbon radicals, studied by in situ real time infrared spectroscopy

A. von Keudell, K.Y. Letourneur, M.C.M. van de Sanden

Research output: Contribution to conferenceAbstractAcademic

Original languageEnglish
PagesTF+EL-WeA8
Number of pages1
Publication statusPublished - 2000
Event47th International Symposium of the American Vacuum Society (AVS47) - Boston, United States
Duration: 2 Oct 20006 Oct 2000

Conference

Conference47th International Symposium of the American Vacuum Society (AVS47)
Abbreviated titleAVS47
CountryUnited States
CityBoston
Period2/10/006/10/00

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