Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzle

A. Graaf, de, P.D.J. van Deurzen, M.C.M. Sanden, van de, D.C. Schram, E. Aldea, G. Dinescu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 : abstract book
Pages	168-
Publication status	Published - 1999
Event	conference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 - Duration: 1 Jan 1999 → …

Conference	conference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998
Period	1/01/99 → …
Other	IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998

Cite this

@inproceedings{2f280ddb2076430a88f6f28588b549ab,

title = "Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzle",

author = "{Graaf, de}, A. and {van Deurzen}, P.D.J. and {Sanden, van de}, M.C.M. and D.C. Schram and E. Aldea and G. Dinescu",

year = "1999",

language = "English",

pages = "168--",

booktitle = "IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 : abstract book",

note = "conference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 ; Conference date: 01-01-1999",

}

Graaf, de, A, van Deurzen, PDJ, Sanden, van de, MCM , Schram, DC, Aldea, E & Dinescu, G 1999, Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzle. in IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 : abstract book. pp. 168-, conference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998, 1/01/99.

TY - GEN

T1 - Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzle

AU - Graaf, de, A.

AU - van Deurzen, P.D.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

AU - Aldea, E.

AU - Dinescu, G.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 168-

BT - IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 : abstract book

T2 - conference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998

Y2 - 1 January 1999

ER -