Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma

J.W.A.M. Gielen; M.C.M. Sanden, van de; D.C. Schram

Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma

J.W.A.M. Gielen, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994
Subtitle of host publication	Abstracts of invited lectures and contributed papers
Editors	M.C.M. van de Sanden
Publisher	European Physical Society (EPS)
Pages	370-371
Publication status	Published - 1994
Event	12th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 1994) - Noordwijkerhout, Netherlands Duration: 23 Aug 1994 → 26 Aug 1994

Publication series

Name	Europhysics conference abstracts
Volume	18E
ISSN (Print)	0378-2271

Conference

Conference	12th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 1994)
Abbreviated title	ESCAMPIG 94
Country/Territory	Netherlands
City	Noordwijkerhout
Period	23/08/94 → 26/08/94

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Cite this

Gielen, J. W. A. M., Sanden, van de, M. C. M., & Schram, D. C. (1994). Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma. In M. C. M. van de Sanden (Ed.), ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994: Abstracts of invited lectures and contributed papers (pp. 370-371). (Europhysics conference abstracts; Vol. 18E). European Physical Society (EPS).

Gielen, J.W.A.M. ; Sanden, van de, M.C.M. ; Schram, D.C. / Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma. ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994: Abstracts of invited lectures and contributed papers. editor / M.C.M. van de Sanden. European Physical Society (EPS), 1994. pp. 370-371 (Europhysics conference abstracts).

@inproceedings{dee76bc665d249fe98d5ddb6c9739a87,

title = "Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma",

author = "J.W.A.M. Gielen and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1994",

language = "English",

series = "Europhysics conference abstracts",

publisher = "European Physical Society (EPS)",

pages = "370--371",

editor = "{van de Sanden}, M.C.M.",

booktitle = "ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994",

note = "12th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 1994), ESCAMPIG 94 ; Conference date: 23-08-1994 Through 26-08-1994",

}

Gielen, JWAM, Sanden, van de, MCM & Schram, DC 1994, Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma. in MCM van de Sanden (ed.), ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994: Abstracts of invited lectures and contributed papers. Europhysics conference abstracts, vol. 18E, European Physical Society (EPS), pp. 370-371, 12th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 1994), Noordwijkerhout, Netherlands, 23/08/94.

Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma. / Gielen, J.W.A.M.; Sanden, van de, M.C.M.; Schram, D.C.
ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994: Abstracts of invited lectures and contributed papers. ed. / M.C.M. van de Sanden. European Physical Society (EPS), 1994. p. 370-371 (Europhysics conference abstracts; Vol. 18E).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma

AU - Gielen, J.W.A.M.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1994

Y1 - 1994

M3 - Conference contribution

T3 - Europhysics conference abstracts

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EP - 371

BT - ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994

A2 - van de Sanden, M.C.M.

PB - European Physical Society (EPS)

T2 - 12th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 1994)

Y2 - 23 August 1994 through 26 August 1994

ER -

Gielen JWAM, Sanden, van de MCM , Schram DC. Deposition of amorphous carbon layers with addition of CF, using an expanding thermal plasma. In van de Sanden MCM, editor, ESCAMPIG 94 : European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, 12th, Noordwijkerhout, The Netherlands, August 23-26, 1994: Abstracts of invited lectures and contributed papers. European Physical Society (EPS). 1994. p. 370-371. (Europhysics conference abstracts).