Demonstration of the 3D integrated Z-Theta actuator

M.F.J. Kremers; K.J. Meessen; J.J.H. Paulides; E.A. Lomonova

Demonstration of the 3D integrated Z-Theta actuator

M.F.J. Kremers
, K.J. Meessen
, J.J.H. Paulides
, E.A. Lomonova

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	13th International Conference and Exhibition, 27-31 May 2013 Berlin, Germany
Place of Publication	Berlin
Publication status	Published - 2013
Event	13th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2013) - Berlin, Germany Duration: 27 May 2013 → 31 May 2013

Conference

Conference	13th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2013)
Abbreviated title	EUSPEN
Country/Territory	Germany
City	Berlin
Period	27/05/13 → 31/05/13

Cite this

@inproceedings{b75a3661f4cc44fda66158dc2861f212,

title = "Demonstration of the 3D integrated Z-Theta actuator",

author = "M.F.J. Kremers and K.J. Meessen and J.J.H. Paulides and E.A. Lomonova",

year = "2013",

language = "English",

booktitle = "13th International Conference and Exhibition, 27-31 May 2013 Berlin, Germany",

note = "13th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2013), EUSPEN ; Conference date: 27-05-2013 Through 31-05-2013",

}

TY - GEN

T1 - Demonstration of the 3D integrated Z-Theta actuator

AU - Kremers, M.F.J.

AU - Meessen, K.J.

AU - Paulides, J.J.H.

AU - Lomonova, E.A.

PY - 2013

Y1 - 2013

M3 - Conference contribution

BT - 13th International Conference and Exhibition, 27-31 May 2013 Berlin, Germany

CY - Berlin

T2 - 13th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2013)

Y2 - 27 May 2013 through 31 May 2013

ER -