Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

Federico Galeotti; Gustav Lindgren; Maurangelo Petruzzella; Frank W.M. van Otten; Hamed Sadeghian Marnani; Abbas Mohtashami; Rob van der Heijden; Andrea Fiore

doi:10.1016/j.ultramic.2021.113368

Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

Federico Galeotti (Corresponding author), Gustav Lindgren, Maurangelo Petruzzella, Frank W.M. van Otten, Hamed Sadeghian Marnani, Abbas Mohtashami, Rob van der Heijden, Andrea Fiore

Research output: Contribution to journal › Article › Academic › peer-review

3 Citations (Scopus)

181 Downloads (Pure)

Abstract

The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.

Original language	English
Article number	113368
Number of pages	6
Journal	Ultramicroscopy
Volume	230
DOIs	https://doi.org/10.1016/j.ultramic.2021.113368
Publication status	Published - Nov 2021

Bibliographical note

Funding Information:
The authors acknowledge I. Seršić-Vollenbroek for contributions in the early stage of the project and S. Plukker for the realization of the fiber-aligning chip holder. This work is part of the research program High Tech Systems and Materials (HTSM) with project number 14658 which is (partly) financed by the Netherlands Organization for Scientific Research (NWO).

Publisher Copyright:
© 2021

Funding

The authors acknowledge I. Seršić-Vollenbroek for contributions in the early stage of the project and S. Plukker for the realization of the fiber-aligning chip holder. This work is part of the research program High Tech Systems and Materials (HTSM) with project number 14658 which is (partly) financed by the Netherlands Organization for Scientific Research (NWO).

Keywords

AFM
Integrated displacement sensor
Opto-electro-mechanics
Photonic crystal

Access to Document

10.1016/j.ultramic.2021.113368

published versionFinal published version, 4.75 MBLicence: TAVERNE

Cite this

@article{84529b324f89400fad07a68c96fceceb,

title = "Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer",

abstract = "The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.",

keywords = "AFM, Integrated displacement sensor, Opto-electro-mechanics, Photonic crystal",

author = "Federico Galeotti and Gustav Lindgren and Maurangelo Petruzzella and {van Otten}, {Frank W.M.} and {Sadeghian Marnani}, Hamed and Abbas Mohtashami and {van der Heijden}, Rob and Andrea Fiore",

note = "Funding Information: The authors acknowledge I. Ser{\v s}i{\'c}-Vollenbroek for contributions in the early stage of the project and S. Plukker for the realization of the fiber-aligning chip holder. This work is part of the research program High Tech Systems and Materials (HTSM) with project number 14658 which is (partly) financed by the Netherlands Organization for Scientific Research (NWO). Publisher Copyright: {\textcopyright} 2021",

year = "2021",

month = nov,

doi = "10.1016/j.ultramic.2021.113368",

language = "English",

volume = "230",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

AU - Galeotti, Federico

AU - Lindgren, Gustav

AU - Petruzzella, Maurangelo

AU - van Otten, Frank W.M.

AU - Sadeghian Marnani, Hamed

AU - Mohtashami, Abbas

AU - van der Heijden, Rob

AU - Fiore, Andrea

N1 - Funding Information: The authors acknowledge I. Seršić-Vollenbroek for contributions in the early stage of the project and S. Plukker for the realization of the fiber-aligning chip holder. This work is part of the research program High Tech Systems and Materials (HTSM) with project number 14658 which is (partly) financed by the Netherlands Organization for Scientific Research (NWO). Publisher Copyright: © 2021

PY - 2021/11

Y1 - 2021/11

N2 - The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.

AB - The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.

KW - AFM

KW - Integrated displacement sensor

KW - Opto-electro-mechanics

KW - Photonic crystal

UR - http://www.scopus.com/inward/record.url?scp=85114165245&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2021.113368

DO - 10.1016/j.ultramic.2021.113368

M3 - Article

C2 - 34492425

AN - SCOPUS:85114165245

SN - 0304-3991

VL - 230

JO - Ultramicroscopy

JF - Ultramicroscopy

M1 - 113368

ER -

Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

Abstract

Bibliographical note

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Cite this