TY - JOUR
T1 - Deformation and wear of pyramidal, silicon-nitride AFM tips scanning micrometre-size features in contact mode
AU - Bloo, M.
AU - Haitjema, H.
AU - Pril, W.O.
PY - 1999
Y1 - 1999
N2 - An experimental study was carried out, in order to investigate the deformation and wear taking place on pyramidal silicon-nitride AFM tips. The study focuses on the contact mode scanning of silicon features of micrometre-size. First the deformation and the mechanisms of wear of the tip during scanning are discussed. After that the results of an experiment showing both phenomena on a used AFM tip are presented. Both the damaged and the unused tip are shown on AFM and SEM images. Using these images the actual mechanisms of wear are determined. It is shown that adhesive wear, low cycle fatigue and plastic deformation take place on the tip.
AB - An experimental study was carried out, in order to investigate the deformation and wear taking place on pyramidal silicon-nitride AFM tips. The study focuses on the contact mode scanning of silicon features of micrometre-size. First the deformation and the mechanisms of wear of the tip during scanning are discussed. After that the results of an experiment showing both phenomena on a used AFM tip are presented. Both the damaged and the unused tip are shown on AFM and SEM images. Using these images the actual mechanisms of wear are determined. It is shown that adhesive wear, low cycle fatigue and plastic deformation take place on the tip.
U2 - 10.1016/S0263-2241(99)00004-4
DO - 10.1016/S0263-2241(99)00004-4
M3 - Article
VL - 25
SP - 203
EP - 211
JO - Measurement: Journal of the International Measurement Confederation
JF - Measurement: Journal of the International Measurement Confederation
SN - 0263-2241
IS - 3
ER -