Abstract
The defocus Polar rOse Estimation Method (POEM) has been introduced recently as an alternative method for defocus estimation in scanning transmission electron microscopy. Its principle of operation is expanded here to include more realistic image models. The details of the expansion are discussed in depth along with the results of new simulation-based performance tests that take into account the effect of measurement noise. The results clearly show that the defocus POEM has the potential to be fast and accurate.
| Original language | English |
|---|---|
| Article number | 6197234 |
| Pages (from-to) | 2723-2730 |
| Number of pages | 8 |
| Journal | IEEE Transactions on Instrumentation and Measurement |
| Volume | 61 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Oct 2012 |
| Externally published | Yes |
Funding
Manuscript received June 20, 2011; revised January 25, 2012; accepted February 28, 2012. Date of publication May 8, 2012; date of current version September 14, 2012. This work was supported by the Condor project at FEI Company, under the responsibilities of the Embedded Systems Institute. Condor is partially supported by the Dutch Ministry of Economic Affairs under the Besluit Subsidies Investeringen Kennisinfrastructuur program. The Associate Editor coordinating the review process for this paper was Dr. Jiong Tang.
Keywords
- Automatic control
- focusing
- parameter estimation
- time series analysis
- transmission electron microscopy