Defect prevention in silica thin films synthesized using AP-PECVD for flexible electronic encapsulation

F.M. Elam, S.A. Starostin, A.S. Meshkova, B.C.A.M. Van Der Velden-Schuermans, M.C.M. Van De Sanden, H.W. De Vries

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Defect prevention in silica thin films synthesized using AP-PECVD for flexible electronic encapsulation'. Together they form a unique fingerprint.

Material Science