Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2009
EventAmorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA - San Francisco, CA, United States
Duration: 13 Apr 200917 Apr 2009
http://www.mrs.org/s09-program-a/

Conference

ConferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA
CountryUnited States
CitySan Francisco, CA
Period13/04/0917/04/09
OtherSymposium held at the 2009 MRS Spring Meeting
Internet address

Cite this

Sanden, van de, M. C. M. (2009). Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA, San Francisco, CA, United States.