Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2009
EventAmorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA - San Francisco, CA, United States
Duration: 13 Apr 200917 Apr 2009
http://www.mrs.org/s09-program-a/

Conference

ConferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA
CountryUnited States
CitySan Francisco, CA
Period13/04/0917/04/09
OtherSymposium held at the 2009 MRS Spring Meeting
Internet address

Cite this

Sanden, van de, M. C. M. (2009). Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA, San Francisco, CA, United States.
Sanden, van de, M.C.M. / Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA, San Francisco, CA, United States.
@conference{7a4c3bda104448c78cbb2ddb3ffadeb1,
title = "Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS",
author = "{Sanden, van de}, M.C.M.",
year = "2009",
language = "English",
note = "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA ; Conference date: 13-04-2009 Through 17-04-2009",
url = "http://www.mrs.org/s09-program-a/",

}

Sanden, van de, MCM 2009, 'Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS' Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA, San Francisco, CA, United States, 13/04/09 - 17/04/09, .

Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS. / Sanden, van de, M.C.M.

2009. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA, San Francisco, CA, United States.

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS

AU - Sanden, van de, M.C.M.

PY - 2009

Y1 - 2009

M3 - Other

ER -

Sanden, van de MCM. Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS. 2009. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA, San Francisco, CA, United States.