Deep hole InP photonic crystals infiltrated with solid polymers and liquid crystals

C.F.V. Carlstrom, Robbie van der Heijden, B.K.C. Kjellander, R.W. Heijden, van der, C.W.M. Bastiaansen, D.J. Broer, F. Karouta, R. Nötzel, E.W.J.M. Drift, van der, H.W.M. Salemink

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Abstract

A procedure to etch deep photonic crystal holes in InGaAsP and subsequently fill them with a low index material such as liq. crystal or a solid polymer has been developed. Successful infiltration was proven by optical transmission measurement and in the case of solid polymer also by cross section inspection.
Original languageEnglish
Title of host publicationProceedings of the 28th International Conference on the Physics of Semiconductors (ICPS 2006) 24-28 July 2006, Vienna, Austria
EditorsW. Jantsch, F. Schaffler
Place of PublicationNew York
PublisherAmerican Institute of Physics
Pages1163-1164
ISBN (Print)978-0-7354-0397-0
DOIs
Publication statusPublished - 2007
Eventconference; ICPS 2006, Vienna, Austria; 2006-07-24; 2006-07-28 -
Duration: 24 Jul 200628 Jul 2006

Publication series

NameAIP Conference Proceedings
Volume893
ISSN (Print)0094-243X

Conference

Conferenceconference; ICPS 2006, Vienna, Austria; 2006-07-24; 2006-07-28
Period24/07/0628/07/06
OtherICPS 2006, Vienna, Austria

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