Debris-resistant liquid EUV mirrors

W. Soer; M. Herpen, van; K. Gielissen; V.Y. Banine

Debris-resistant liquid EUV mirrors

W. Soer, M. Herpen, van, K. Gielissen, V.Y. Banine

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2007

Bibliographical note

Poster presented at the 6th International Symposium on Extreme Ultraviolet Lithography 2007 (2008 EUVL Symposium), 29-31 October, 2007, Sappora, Japan

Cite this

@conference{c2f356a7dc82429291f913b099acfcac,

title = "Debris-resistant liquid EUV mirrors",

author = "W. Soer and \{Herpen, van\}, M. and K. Gielissen and V.Y. Banine",

note = "Poster presented at the 6th International Symposium on Extreme Ultraviolet Lithography 2007 (2008 EUVL Symposium), 29-31 October, 2007, Sappora, Japan",

year = "2007",

language = "English",

}