Abstract
Introduction
Problem Sn-based EUV sources generate
Sn debris that contaminates nearby EUV
mirrors and thus reduces their reflectivity.
Solution Liquid EUV mirrors: grazingincidence
mirrors with a liquid metal or alloy
surface. The liquid surface absorbs incoming
Sn debris while maintaining a low surface
roughness and hence a high EUV reflectivity.
Applications Dose sensors, reflective
debris mitigation tools (e.g. reflective foil trap)
and debris-resistant collector optics.
Objectives
• Measure reflectivity of EUV radiation and
ionic Sn debris on liquid metal surface.
• Obtain good wetting of liquid metal on
metal substrates to enable tilting of the
liquid mirror into arbitrary orientation while
maintaining a low surface roughness.
Original language | English |
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Publication status | Published - 2007 |