| Original language | Dutch |
|---|---|
| Pages (from-to) | 21-27 |
| Journal | Nevac Blad |
| Volume | 50 |
| Issue number | 3 |
| Publication status | Published - 2012 |
De invloed van ionen tijdens plasma-geassisteerde atoomlaagdepositie
H.B. Profijt, M.C.M. Sanden, van de, W.M.M. Kessels
Research output: Contribution to journal › Article › Professional
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