DC-to-DC converter comprising a reconfigurable capacitor unit

J.H. Klootwijk (Inventor), H.J. Bergveld (Inventor), F. Roozeboom (Inventor), D. Reefman (Inventor), J. Ruigrok (Inventor)

Research output: PatentPatent publication

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Abstract

The present invention relates to a configurable trench multi-capacitor device comprising a trench in a semiconductor substrate. The trench has a lateral extension exceeding 10 micrometer and a trench filling includes a number of at least four electrically conductive capacitor-electrode layers. A switching unit is provided that comprises a plurality of switching elements electrically interconnected between different capacitor-electrode layers of the trench filling. A control unit is connected with the switching unit and configured to generate and provide to the switching unit respective control signals for forming a respective one of a plurality of multi-capacitor configurations using the capacitor-electrode layers of the trench filling.
Original languageEnglish
Patent numberUS8395914
Publication statusPublished - 12 Mar 2013
Externally publishedYes

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