Data-driven modeling and optimization of semiconductor manufacturing

Patrick Christoph Deenen

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Industrial Engineering and Innovation Sciences
Supervisors/Advisors	Adan, Ivo J.B.F., Promotor Nuijten, Wim P.M., Promotor Akçay, Alp E., Copromotor
Award date	22 Sept 2023
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-94-6469-457-4
Publication status	Published - 22 Sept 2023

Proefschrift. - Embargo. - pdf open access 22/09/2024.

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@phdthesis{a555797d061e4e4397fcd4931c64ce6b,

title = "Data-driven modeling and optimization of semiconductor manufacturing",

author = "Deenen, {Patrick Christoph}",

note = "Proefschrift. - Embargo. - pdf open access 22/09/2024.",

year = "2023",

month = sep,

day = "22",

language = "English",

isbn = "978-94-6469-457-4",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Industrial Engineering and Innovation Sciences",

}