Data-based motion control of wafer scanners

Research output: Contribution to journalConference articlepeer-review

10 Citations (Scopus)
12 Downloads (Pure)


This paper gives an exposition of examples of data-based control and optimization that found their way to successful application in the motion systems of industrial wafer scanners. The examples represent selective works brought together in an overview that highlights the possibilities, challenges, and open issues in data-based motion control of wafer scanners.

Original languageEnglish
Pages (from-to)1-12
Number of pages12
Issue number13
Publication statusPublished - 2016


  • Data-based control
  • machine-in-the-loop optimization
  • motion control
  • wafer scanners

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