Data-based motion control of wafer scanners

Research output: Contribution to journalConference articlepeer-review

10 Citations (Scopus)
12 Downloads (Pure)

Abstract

This paper gives an exposition of examples of data-based control and optimization that found their way to successful application in the motion systems of industrial wafer scanners. The examples represent selective works brought together in an overview that highlights the possibilities, challenges, and open issues in data-based motion control of wafer scanners.

Original languageEnglish
Pages (from-to)1-12
Number of pages12
JournalIFAC-PapersOnLine
Volume49
Issue number13
DOIs
Publication statusPublished - 2016

Keywords

  • Data-based control
  • machine-in-the-loop optimization
  • motion control
  • wafer scanners

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