Data-based feed-forward control in MIMO motion systems

Mark Baggen; Marcel Heertjes; Ramidin Kamidi

doi:10.1109/ACC.2008.4586954

Data-based feed-forward control in MIMO motion systems

Mark Baggen, Marcel Heertjes, Ramidin Kamidi

Dynamics and Control

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

34 Citations (Scopus)

1 Downloads (Pure)

Abstract

For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.

Original language	English
Title of host publication	2008 American Control Conference, ACC
Publisher	American Automatic Control Council (AACC)
Pages	3011-3016
Number of pages	6
ISBN (Print)	9781424420797
DOIs	https://doi.org/10.1109/ACC.2008.4586954
Publication status	Published - 30 Sept 2008
Event	2008 American Control Conference (ACC 2008) - Westin Seattle Hotel, Seattle, WA, United States Duration: 11 Jun 2008 → 13 Jun 2008 http://acc2008.a2c2.org/

Conference

Conference	2008 American Control Conference (ACC 2008)
Abbreviated title	ACC 2008
Country/Territory	United States
City	Seattle, WA
Period	11/06/08 → 13/06/08
Internet address	http://acc2008.a2c2.org/

Keywords

Data-based control
Finite impulse response modelling
Gauss-newton optimization
Wafer scanners

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10.1109/ACC.2008.4586954

Cite this

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title = "Data-based feed-forward control in MIMO motion systems",

abstract = "For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.",

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AU - Heertjes, Marcel

AU - Kamidi, Ramidin

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AB - For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.

KW - Data-based control

KW - Finite impulse response modelling

KW - Gauss-newton optimization

KW - Wafer scanners

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BT - 2008 American Control Conference, ACC

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Y2 - 11 June 2008 through 13 June 2008

ER -

Data-based feed-forward control in MIMO motion systems

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