Abstract
For improved output synchronization in master-slave systems, a data-based control tuning is presented. Herein the coefficients of two finite-duration impulse response (FIR) filters are found through machine-in-the-loop optimization. One filter is used to shape the input to the slave system while the other filter is used as feedforward controller. With this two-filter structure we circumvent the problem of being limited either by model uncertainty in approximating the inverse plant dynamics or by closed-loop bandwidth constraints of the slave system. The optimized controller induces machine-specific (improved) output synchronization. This is demonstrated on the high-precision motion systems of an industrial wafer scanner.
| Original language | English |
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| Title of host publication | Proceedings of the 2012 American Control Conference (ACC 2012), 27-29 June 2012, Montréal, Canada |
| Place of Publication | Piscataway |
| Publisher | Institute of Electrical and Electronics Engineers |
| Pages | 2461-2466 |
| ISBN (Print) | 978-1-4577-1094-0 |
| Publication status | Published - 2012 |
| Event | 2012 American Control Conference, ACC 2012 - Fairmont Queen Elizabeth, Montreal, Canada Duration: 27 Jun 2012 → 29 Jun 2012 http://acc2012.a2c2.org/ http://acc2012.a2c2.org/index.php |
Conference
| Conference | 2012 American Control Conference, ACC 2012 |
|---|---|
| Abbreviated title | ACC 2012 |
| Country/Territory | Canada |
| City | Montreal |
| Period | 27/06/12 → 29/06/12 |
| Internet address |