Cyclotron-based high energy ion channeling

Ion channeling for materials analysis is usually carried out with He ion beam energies less than 3 MeV. The AVF-cyclotron at Eindhoven University of Technology allows the use of higher beam energies (3–30 MeV) which is of potential interest due to a high angular resolution, a large analysable depth range and the application of nuclear reactions or resonant scattering cross-sections. In this paper the enhanced angular resolution for 12.6 MeV He ions is demonstrated by angular scans from a buried Si1-xGex layer. The enhanced analysable depth range is shown by quantitative defect depth profiling of a 4 µm thick relaxed SiGe multilayer buffer. Finally, a study on vibrational amplitudes in bulk InP was carried out by a combination of channeling and nuclear reaction analysis using the 31P(a,p)34S reaction.