Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma

T.J.M. Donders; T.J.A. Staps; J. Beckers

doi:10.1109/ICOPS45751.2022.9813012

Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma

T.J.M. Donders, T.J.A. Staps, J. Beckers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A nanodusty plasma comprises a partially ionized gas containing nanometer-sized solid dust particles. Typical examples of such plasmas can be found in astrophysical objects (such as planetary rings or accretion disks), but also in semiconductor manufacturing, material processing devices and in laboratories on Earth. In the latter, nanodusty plasmas are created by igniting a discharge in a mixture of a noble background gas and a reactive gas. If the density of the nuclei is sufficiently large, the formed particles will suddenly coagulate and attain a permanent negative charge due to the collection of free electrons from the plasma.

Original language	English
Title of host publication	2022 IEEE International Conference on Plasma Science, ICOPS 2022
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	1
ISBN (Electronic)	978-1-6654-7925-7
DOIs	https://doi.org/10.1109/ICOPS45751.2022.9813012
Publication status	Published - 6 Jul 2022
Event	2022 IEEE International Conference on Plasma Science, ICOPS 2022 - Seattle, United States Duration: 22 May 2022 → 26 May 2022

Conference

Conference	2022 IEEE International Conference on Plasma Science, ICOPS 2022
Abbreviated title	ICOPS 2022
Country/Territory	United States
City	Seattle
Period	22/05/22 → 26/05/22

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10.1109/ICOPS45751.2022.9813012

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title = "Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma",

abstract = "A nanodusty plasma comprises a partially ionized gas containing nanometer-sized solid dust particles. Typical examples of such plasmas can be found in astrophysical objects (such as planetary rings or accretion disks), but also in semiconductor manufacturing, material processing devices and in laboratories on Earth. In the latter, nanodusty plasmas are created by igniting a discharge in a mixture of a noble background gas and a reactive gas. If the density of the nuclei is sufficiently large, the formed particles will suddenly coagulate and attain a permanent negative charge due to the collection of free electrons from the plasma.",

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Donders, TJM , Staps, TJA & Beckers, J 2022, Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma. in 2022 IEEE International Conference on Plasma Science, ICOPS 2022., 9813012, Institute of Electrical and Electronics Engineers, 2022 IEEE International Conference on Plasma Science, ICOPS 2022, Seattle, Washington, United States, 22/05/22. https://doi.org/10.1109/ICOPS45751.2022.9813012

Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma. / Donders, T.J.M.; Staps, T.J.A.; Beckers, J.
2022 IEEE International Conference on Plasma Science, ICOPS 2022. Institute of Electrical and Electronics Engineers, 2022. 9813012.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma

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AU - Staps, T.J.A.

AU - Beckers, J.

PY - 2022/7/6

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N2 - A nanodusty plasma comprises a partially ionized gas containing nanometer-sized solid dust particles. Typical examples of such plasmas can be found in astrophysical objects (such as planetary rings or accretion disks), but also in semiconductor manufacturing, material processing devices and in laboratories on Earth. In the latter, nanodusty plasmas are created by igniting a discharge in a mixture of a noble background gas and a reactive gas. If the density of the nuclei is sufficiently large, the formed particles will suddenly coagulate and attain a permanent negative charge due to the collection of free electrons from the plasma.

AB - A nanodusty plasma comprises a partially ionized gas containing nanometer-sized solid dust particles. Typical examples of such plasmas can be found in astrophysical objects (such as planetary rings or accretion disks), but also in semiconductor manufacturing, material processing devices and in laboratories on Earth. In the latter, nanodusty plasmas are created by igniting a discharge in a mixture of a noble background gas and a reactive gas. If the density of the nuclei is sufficiently large, the formed particles will suddenly coagulate and attain a permanent negative charge due to the collection of free electrons from the plasma.

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ER -

Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma

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