Cycle time distributions of semiconductor workstations using aggregate modeling

C.P.L. Veeger; L.F.P. Etman; J.E. Rooda; J. van Herk

doi:10.1109/WSC.2009.5429268

Cycle time distributions of semiconductor workstations using aggregate modeling

C.P.L. Veeger, L.F.P. Etman, J.E. Rooda, J. van Herk

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

2 Downloads (Pure)

Abstract

Recently an aggregate modeling method has been developed to predict cycle time distributions as a function of throughput for manufacturing workstations with dispatching. The aggregate model is a single-server representation of the workstation with a workload-dependent process time distribution, and a workload-dependent overtaking distribution. The process time and overtaking distribution can be determined from arrival and departure events measured from the workstation at the factory floor. In this paper, we validate the proposed method in the context of semiconductor manufacturing. In particular weconsider a lithography workstation. First, we present a simulation case that demonstrates the accuracy of the aggregate model to predict cycle time distributions. Second, we apply the aggregate modeling method to a case from semiconductor industry,and illustrate how the method performs using arrival and departure data obtained from the manufacturing execution system.

Original language	English
Title of host publication	Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA
Editors	M.D. Rosetti, R.R. Hill, A. Johansson, A Dunkin, R.G. Ingalls
Place of Publication	United States, Austin, Texas
Publisher	Institute of Electrical and Electronics Engineers
Pages	1610-1621
DOIs	https://doi.org/10.1109/WSC.2009.5429268
Publication status	Published - 2009

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Veeger, C. P. L., Etman, L. F. P., Rooda, J. E., & van Herk, J. (2009). Cycle time distributions of semiconductor workstations using aggregate modeling. In M. D. Rosetti, R. R. Hill, A. Johansson, A. Dunkin, & R. G. Ingalls (Eds.), Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA (pp. 1610-1621). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/WSC.2009.5429268

Veeger, C.P.L. ; Etman, L.F.P. ; Rooda, J.E. et al. / Cycle time distributions of semiconductor workstations using aggregate modeling. Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. editor / M.D. Rosetti ; R.R. Hill ; A. Johansson ; A Dunkin ; R.G. Ingalls. United States, Austin, Texas : Institute of Electrical and Electronics Engineers, 2009. pp. 1610-1621

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title = "Cycle time distributions of semiconductor workstations using aggregate modeling",

abstract = "Recently an aggregate modeling method has been developed to predict cycle time distributions as a function of throughput for manufacturing workstations with dispatching. The aggregate model is a single-server representation of the workstation with a workload-dependent process time distribution, and a workload-dependent overtaking distribution. The process time and overtaking distribution can be determined from arrival and departure events measured from the workstation at the factory floor. In this paper, we validate the proposed method in the context of semiconductor manufacturing. In particular weconsider a lithography workstation. First, we present a simulation case that demonstrates the accuracy of the aggregate model to predict cycle time distributions. Second, we apply the aggregate modeling method to a case from semiconductor industry,and illustrate how the method performs using arrival and departure data obtained from the manufacturing execution system.",

author = "C.P.L. Veeger and L.F.P. Etman and J.E. Rooda and {van Herk}, J.",

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doi = "10.1109/WSC.2009.5429268",

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editor = "M.D. Rosetti and R.R. Hill and A. Johansson and A Dunkin and R.G. Ingalls",

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publisher = "Institute of Electrical and Electronics Engineers",

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Veeger, CPL, Etman, LFP, Rooda, JE & van Herk, J 2009, Cycle time distributions of semiconductor workstations using aggregate modeling. in MD Rosetti, RR Hill, A Johansson, A Dunkin & RG Ingalls (eds), Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. Institute of Electrical and Electronics Engineers, United States, Austin, Texas, pp. 1610-1621. https://doi.org/10.1109/WSC.2009.5429268

Cycle time distributions of semiconductor workstations using aggregate modeling. / Veeger, C.P.L.; Etman, L.F.P.; Rooda, J.E. et al.
Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. ed. / M.D. Rosetti; R.R. Hill; A. Johansson; A Dunkin; R.G. Ingalls. United States, Austin, Texas: Institute of Electrical and Electronics Engineers, 2009. p. 1610-1621.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Veeger CPL, Etman LFP, Rooda JE, van Herk J. Cycle time distributions of semiconductor workstations using aggregate modeling. In Rosetti MD, Hill RR, Johansson A, Dunkin A, Ingalls RG, editors, Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. United States, Austin, Texas: Institute of Electrical and Electronics Engineers. 2009. p. 1610-1621 doi: 10.1109/WSC.2009.5429268

Cycle time distributions of semiconductor workstations using aggregate modeling

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