CxHy radical measurements using cavity ring down spectroscopy in a remote Ar/C2H2 plasma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings
Publication status	Published - 2000

Cite this

@inproceedings{63e7a18d89834b36bb6f16e60726f374,

title = "CxHy radical measurements using cavity ring down spectroscopy in a remote Ar/C2H2 plasma",

author = "\{Sanden, van de\}, M.C.M. and K.G.Y. Letourneur and M.G.H. Boogaarts and D.C. Schram",

year = "2000",

language = "English",

booktitle = "AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings",

}

CxHy radical measurements using cavity ring down spectroscopy in a remote Ar/C2H2 plasma. / Sanden, van de, M.C.M.; Letourneur, K.G.Y.; Boogaarts, M.G.H. et al.
AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings. 2000.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic