CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Chemical Engineering and Chemistry
Supervisors/Advisors	Marin, G.B.M.M., Promotor Schoonman, Joop, Promotor, External person
Award date	8 Dec 1997
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-386-0768-7
DOIs	https://doi.org/10.6100/IR501361
Publication status	Published - 1997

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@phdthesis{5530b00f2ead43ce8c16174e151e0c2a,

title = "CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling",

author = "E.N. Orij",

year = "1997",

doi = "10.6100/IR501361",

language = "English",

isbn = "90-386-0768-7",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Chemical Engineering and Chemistry",

}