Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD

V. Longo, F. Roozeboom, W.M.M. Kessels, M.A. Verheijen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

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Pharmacology, Toxicology and Pharmaceutical Science