Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Pacific RIM meeting on electrochemical and solid-state science, (PRIME), October 7-12 2012, Honolulu Hawaii
Pages	69-77
DOIs	https://doi.org/10.1149/05013.0069ecst
Publication status	Published - 2012

Access to Document

Longo, V., Roozeboom, F., Kessels, W. M. M., & Verheijen, M. A. (2012). Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD. In Pacific RIM meeting on electrochemical and solid-state science, (PRIME), October 7-12 2012, Honolulu Hawaii (pp. 69-77). (ECS Transactions; Vol. 50). https://doi.org/10.1149/05013.0069ecst

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title = "Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD",

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Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD. / Longo, V.; Roozeboom, F.; Kessels, W.M.M. et al.
Pacific RIM meeting on electrochemical and solid-state science, (PRIME), October 7-12 2012, Honolulu Hawaii. 2012. p. 69-77 (ECS Transactions; Vol. 50).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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