Creep as a reliability problem in MEMS

R. Modlinski; A. Witvrouw; P. Ratchev; A. Jourdain; V. Simons; H.A.C. Tilmans; J.M.J. Toonder, den; R. Puers; I.C.D.Y.M. Wolf

doi:10.1016/j.microrel.2004.07.066

Creep as a reliability problem in MEMS

R. Modlinski, A. Witvrouw, P. Ratchev, A. Jourdain, V. Simons, H.A.C. Tilmans, J.M.J. Toonder, den, R. Puers, I.C.D.Y.M. Wolf

Polymer Technology

Research output: Contribution to journal › Article › Academic › peer-review

40 Citations (Scopus)

2 Downloads (Pure)

Abstract

15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis

Original language	English
Pages (from-to)	1733-1738
Journal	Microelectronics and Reliability : an International Journal and World Abstracting Service
Volume	44
Issue number	9-11
DOIs	https://doi.org/10.1016/j.microrel.2004.07.066
Publication status	Published - 2004

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@article{55445763e72f4d0da313c479251c9f10,

title = "Creep as a reliability problem in MEMS",

abstract = "15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis",

author = "R. Modlinski and A. Witvrouw and P. Ratchev and A. Jourdain and V. Simons and H.A.C. Tilmans and {Toonder, den}, J.M.J. and R. Puers and I.C.D.Y.M. Wolf",

year = "2004",

doi = "10.1016/j.microrel.2004.07.066",

language = "English",

volume = "44",

pages = "1733--1738",

journal = "Microelectronics Reliability",

issn = "0026-2714",

publisher = "Elsevier",

number = "9-11",

}

Creep as a reliability problem in MEMS. / Modlinski, R.; Witvrouw, A.; Ratchev, P.; Jourdain, A.; Simons, V.; Tilmans, H.A.C.; Toonder, den, J.M.J.; Puers, R.; Wolf, I.C.D.Y.M.

In: Microelectronics and Reliability : an International Journal and World Abstracting Service, Vol. 44, No. 9-11, 2004, p. 1733-1738.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Creep as a reliability problem in MEMS

AU - Modlinski, R.

AU - Witvrouw, A.

AU - Ratchev, P.

AU - Jourdain, A.

AU - Simons, V.

AU - Tilmans, H.A.C.

AU - Toonder, den, J.M.J.

AU - Puers, R.

AU - Wolf, I.C.D.Y.M.

PY - 2004

Y1 - 2004

N2 - 15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis

AB - 15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis

U2 - 10.1016/j.microrel.2004.07.066

DO - 10.1016/j.microrel.2004.07.066

M3 - Article

VL - 44

SP - 1733

EP - 1738

JO - Microelectronics Reliability

JF - Microelectronics Reliability

SN - 0026-2714

IS - 9-11

ER -