Creep as a reliability problem in MEMS

R. Modlinski, A. Witvrouw, P. Ratchev, A. Jourdain, V. Simons, H.A.C. Tilmans, J.M.J. Toonder, den, R. Puers, I.C.D.Y.M. Wolf

Research output: Contribution to journalArticleAcademicpeer-review

40 Citations (Scopus)
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Abstract

15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis
Original languageEnglish
Pages (from-to)1733-1738
JournalMicroelectronics and Reliability : an International Journal and World Abstracting Service
Volume44
Issue number9-11
DOIs
Publication statusPublished - 2004

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