Creep as a reliability problem in MEMS

R. Modlinski, A. Witvrouw, P. Ratchev, A. Jourdain, V. Simons, H.A.C. Tilmans, J.M.J. Toonder, den, R. Puers, I.C.D.Y.M. Wolf

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Abstract

15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis
Original languageEnglish
Pages (from-to)1733-1738
JournalMicroelectronics and Reliability : an International Journal and World Abstracting Service
Volume44
Issue number9-11
DOIs
Publication statusPublished - 2004

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Electron devices
microelectromechanical systems
MEMS
Creep
Physics
physics
electrons

Cite this

Modlinski, R., Witvrouw, A., Ratchev, P., Jourdain, A., Simons, V., Tilmans, H. A. C., ... Wolf, I. C. D. Y. M. (2004). Creep as a reliability problem in MEMS. Microelectronics and Reliability : an International Journal and World Abstracting Service, 44(9-11), 1733-1738. https://doi.org/10.1016/j.microrel.2004.07.066
Modlinski, R. ; Witvrouw, A. ; Ratchev, P. ; Jourdain, A. ; Simons, V. ; Tilmans, H.A.C. ; Toonder, den, J.M.J. ; Puers, R. ; Wolf, I.C.D.Y.M. / Creep as a reliability problem in MEMS. In: Microelectronics and Reliability : an International Journal and World Abstracting Service. 2004 ; Vol. 44, No. 9-11. pp. 1733-1738.
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Modlinski, R, Witvrouw, A, Ratchev, P, Jourdain, A, Simons, V, Tilmans, HAC, Toonder, den, JMJ, Puers, R & Wolf, ICDYM 2004, 'Creep as a reliability problem in MEMS', Microelectronics and Reliability : an International Journal and World Abstracting Service, vol. 44, no. 9-11, pp. 1733-1738. https://doi.org/10.1016/j.microrel.2004.07.066

Creep as a reliability problem in MEMS. / Modlinski, R.; Witvrouw, A.; Ratchev, P.; Jourdain, A.; Simons, V.; Tilmans, H.A.C.; Toonder, den, J.M.J.; Puers, R.; Wolf, I.C.D.Y.M.

In: Microelectronics and Reliability : an International Journal and World Abstracting Service, Vol. 44, No. 9-11, 2004, p. 1733-1738.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - Creep as a reliability problem in MEMS

AU - Modlinski, R.

AU - Witvrouw, A.

AU - Ratchev, P.

AU - Jourdain, A.

AU - Simons, V.

AU - Tilmans, H.A.C.

AU - Toonder, den, J.M.J.

AU - Puers, R.

AU - Wolf, I.C.D.Y.M.

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AB - 15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis

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EP - 1738

JO - Microelectronics Reliability

JF - Microelectronics Reliability

SN - 0026-2714

IS - 9-11

ER -